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Boron-Silicon Thin Film Formation Using a Slim Vertical Chemical Vapor Deposition Reactor
Department of Chemistry Applications, Yokohama National University, Yokohana, Japan
Department of Chemistry Applications, Yokohama National University, Yokohana, Japan
Department of Chemistry Applications, Yokohama National University, Yokohana, Japan
National Institutes of Advanced Science and Technology, Tsukuba, Japan
Minimal Fab Promotion Organization, Tsukuba, Japan
Minimal Fab Promotion Organization, Tsukuba, Japan
- 1 Department of Chemistry Applications, Yokohama National University, Yokohana, Japan
- 2 Department of Chemistry Applications, Yokohama National University, Yokohana, Japan
- 3 Department of Chemistry Applications, Yokohama National University, Yokohana, Japan
- 4 National Institutes of Advanced Science and Technology, Tsukuba, Japan
- 5 Minimal Fab Promotion Organization, Tsukuba, Japan
- 6 Minimal Fab Promotion Organization, Tsukuba, Japan
Advances in Chemical Engineering and Science·Volume 13 (2022)·Pages 7–18·Published 27 December 2022·DOI10.4236/aces.2023.131002
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Abstract
A boron-silicon film was formed from boron trichloride gas and dichlorosilane gas at about 900 ℃ in ambient hydrogen at atmospheric pressure utilizing a slim vertical cold wall chemical vapor deposition reactor designed for the Minimal Fab system. The gas flow rates were 80, 20 and 0.1 - 20 sccm for the hydrogen, dichlorosilane and boron trichloride gases, respectively. The gas transport condition in the reactor was shown to quickly become stable when evaluated by quartz crystal microbalances at the inlet and outlet. The boron-silicon thin film was formed by achieving the various boron concentrations of 0.16% - 80%, the depth profile of which was flat. By observing the cross-sectional TEM image, the obtained film was dense. The boron trichloride gas is expected to be useful for the quick fabrication of various materials containing boron at significantly low and high concentrations.
KeywordsChemical Vapor DepositionBoron-Silicon FilmBoron TrichlorideDichlorosilane
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