Operator Splitting Method for Coupled Problems:Transport and Maxwell Equations
- 1
Abstract
In this article a new approach is considered for implementing operator splitting methods for transport problems, influenced by electric fields. Our motivation came to model PE-CVD (plasma-enhanced chemical vapor deposition) processes, means the flow of species to a gas-phase, which are influenced by an electric field. Such a field we can model by wave equations. The main contributions are to improve the standard discretization schemes of each part of the coupling equation. So we discuss an improvement with implicit Runge- Kutta methods instead of the Yee’s algorithm. Further we balance the solver method between the Maxwell and Transport equation.
- M. Ohring, “Materials Science of Thin Films,” 2nd Edition, Academic Press, San Diego, New York, Boston, London, 2002.
- J. Geiser and M. Arab, “Simulation of a Chemical Vapor Deposition: Mobile and Immobile Zones and Homogeneous Layers,” Journal of Porous Media, Begell House Inc., Redding, 2009, Vol. 1, No. 2, pp. 123-143.
- L. Rudniak, “Numerical Simulation of Chemical Vapour Deposition Process in Electric Field,” Computers & Chemical Engineering, Vol. 22, Supplement 1, 1998, pp. 755-758.
- J. Van Roey, J. van der Donk and P. E. Lagasse, “Beam-Propagation Method: Analysis and Assessment,” Journal of the Optical Society of America, Vol. 71, No. 7, 1981, pp. 803-810. doi:10.1364/JOSA.71.000803
- M. D. Feit and J. A. Fleck Jr., “Analysis of Rib Waveguides and Couplers by the Propa-gating Beam Method,” Journal of the Optical Society of America A, Vol. 7, No. 1, 1990, pp. 73-79. doi:10.1364/JOSAA.7.000073
- M. D. Feit and J. A. Fleck Jr., “Light Propagation in Graded-Index Optical Fibers,” OSA Applied Optics, Vol. 17, No. 24, 1978, pp. 3990- 3998. doi:10.1364/AO.17.003990
- L. Thylen, E. M. Wright, G. I. Stegeman, C. T. Seaton and J. V. Moloney, “Beam-Propagation Method Analysis of a Nonlinear Directional Coupler,” OSA Optics Letters, Vol. 11, No. 11, 1986, pp. 739-741. doi:10.1364/OL.11.000739
- J. A. Fleck, J. R. Morris Jr. and M. D. Feit, “Time-dependent Propagation of High Energy Laser Beams through the Atmosphere,” Applied Physics, Vol. 10, No. 2, 1976, pp. 129-160. doi:10.1007/BF00896333
- M. Lax, J. H. Batteh and G. P. Agrawai, “Channeling of Intense Electromagnetic Beams,” Journal of Applied Physics, Vol. 51, No. 1, 1981, pp. 109-125. doi:10.1063/1.328442
- G. I. Marchuk, “Some Applications of Splitting-up Methods to the Solution of Mathematical Physics Problems,” Aplikace Matematiky, Vol. 1, 1968, pp. 103-132.
- G. Strang, “On the Constraction and Comparion of Difference Schemes,” SIAM J. Numerical Analysis, Vol. 5, No. 3, 1968, pp. 506-517. doi:10.1137/0705041
- K. Okamoto, “Fundamentals of Optical Waveguides,” Academic Press, New York, 2005.
- A Taflove, “Computational Electrodynamics: The Finite Difference Time Domain Method,” Arctech House Inc., 1995.
- J. P. Berenger, “A Perfectly Matched Layer for the Absorption of Electromagnetic Waves,” J. Comp. Phys., Vol. 111, 2005, pp. 185-220.