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XPS Depth Profile Study of Sprayed Ga<sub>2</sub>O<sub>3</sub> Thin Films
Department of Electrical & Electronic Engineering, Ahsanullah University of Science & Technology, Dhaka, Bangladesh
- 1 Department of Electrical & Electronic Engineering, Ahsanullah University of Science & Technology, Dhaka, Bangladesh
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Abstract
Ga 2 O 3 thin films were fabricated by spray pyrolysis method using gallium acetylacetonate as source material and water as oxidizer. The films were annealed at 450°C for 60 minutes in argon atmosphere. X-ray photoelectron spectroscopy (XPS) depth profile studies were carried out to analyze the stoichiometry and composition of sprayed as-deposited and annealed Ga 2 O 3 thin films. Surface layers and the inner layers of as-deposited and annealed films were found nearly stoichiometric.
KeywordsGa<sub>2</sub>O<sub>3</sub>Thin Filmsx-Ray Photoelectron SpectroscopyDepth Profiling
- Orita, M., Ohta, H., Hirano, M. and Hosono, H. (2000) Deep-Ultraviolet Transparent Conductive β-Ga2O3 Thin Films. Applied Physics Letters, 77, 4166-4168. https://doi.org/10.1063/1.1330559
- Orita, M., Hiramatsu, H., Ohta, H., Hirano, M. and Hosono, H. (2002) Preparation of Highly Conductive, Deep Ultraviolet Transparent β-Ga2O3 Thin Film at Low Deposition Temperatures. Thin Solid Films, 411, 134-139. https://doi.org/10.1016/S0040-6090(02)00202-X
- Miyata, T., Nakatani, T. and Minami, T. (2000) Manganese-Activated Gallium Oxide Electroluminescent Phosphor Thin Films Prepared Using Various Deposition Methods. Thin Solid Films, 373, 145-149. https://doi.org/10.1016/S0040-6090(00)01123-8
- Fujihara, S. and Shibata, Y. (2006) Luminescence of Cr3+ Ions Associated with Surpassing the Green-Emissive Defect Centers in β-Ga2O3. Journal of Luminescence, 121, 470-474. https://doi.org/10.1016/j.jlumin.2005.11.014
- Fleischer, M. and Meixner, H. (1991) Gallium Oxide Thin Films: A New Material for High-Temperature Oxygen Sensors. Sensors and Actuators B: Chemical, 4, 437- 441. https://doi.org/10.1016/0925-4005(91)80148-D
- Trinchi, A., Wlodarski, W. and Li, Y.X. (2004) Hydrogen Sensitive Ga2O3 Schottky Diode Sensor Based on SiC. Sensors and Actuators B: Chemical, 100, 94-98. https://doi.org/10.1016/j.snb.2003.12.028
- Trinchi, A., Kaciulis, S., Pandolfi, L., Ghantasala, M.K., Wlodarski, Y.X., Li, W., Viticoli, S., Comini, E. and Sberveglieri, G. (2004) Characterization of Ga2O3 Based MRISiC Hydrogen Gas Sensors. Sensors and Actuators B: Chemical, 103, 129-135. https://doi.org/10.1016/j.snb.2004.04.112
- Li, Y., Trinchi, A., Wlodarski, W., Galatsis, K. and Kalantar-Zadeh, K. (2003) Investigation of the Oxygen Gas Sensing Performance of Ga2O3 Thin Films with Different Dopants. Sensors and Actuators B: Chemical, 93, 431-434. https://doi.org/10.1016/S0925-4005(03)00171-0
- Matsuzaki, M., Hiramatsu, H., Nomura, K., Yanagi, H., Kamiya, T., Hirano, M. and Hosono, H. (2006) Growth, Structure and Carrier Transport Properties of Ga2O3 Epitaxial Film Examined for Transparent Field-Effect Transistor. Thin Solid Films, 496, 37-41. https://doi.org/10.1016/j.tsf.2005.08.187
- Passlak, M., Schubert, E.F., Hobson, W.S., Hong, M., Moriya, N., Chu, S.N.G., Koutadinidis, K., Maunaerts, J.P., Schnoes, M.L. and Zydzik, G.J. (1995) Ga2O3 Films for Electronic and Optoelectronic Applications. Journal of Applied Physics, 77, 686- 693. https://doi.org/10.1063/1.359055