Research ArticleOpen AccessGoogle Scholar indexed
Analysis for Transverse Sensitivity of the Microaccelerometer
- 1
- 2
- 3
Copy link · social · email
Abstract
For the microaccelerometer, strong axial response and weak cross-axial one are always expected. This paper presents a general analysis about transverse sensitivity of the microaccelerometer. The analysis model is developed, where the influence of response stiffness and damping in different axes, as well as symmetrical decline angles of 3 degrees of freedom system is considered. Moreover, multi-freedom vibration equations based on the analysis model are established. And the equations are solved on condition that damping force is ignored. Finally, the theoretical analysis about transverse sensitivity is accomplished, and some effective methods, which are beneficial to reduce cross disturbance, are provided.
KeywordsMEMSAccelerometersTransverse SensitivityMulti-Freedom Vibration Equation
- L. Fei, X. X. Zhong, Z. Y. Wen, et al, “Methods for reducing sensitivity of micromachined silicon accelerometer,” Optics and Precision Engineering, No. 3, pp. 64–68, 1995.
- J. S. Wang, Q. Wang, and S. H. Sun, “Effect of cross- coupling coefficient of accelerometer on gyros–free inertial measurement unit,” Journal of Chinese Inertial Technology, No. 11, pp. 29–33, 2003.
- L. Zhong., J. G. Liu, and H. Y. Zhao, “A solution to the problem of excessive error of piezoelectrical accelerometer’s cross axis sensitivity,” Electro-Mechanical Engineering, Vol. 20, pp. 4–5, 2004.
- Y Liu, Z. Y. Wen, Z. Q. Wen, et al, “Design and fabrication of a high-sensitive capacitive biaxial microaccelerometer,” J. Micromech. Microeng, Vol. 17, pp. 36–41, 2007.
- Y Liu, Z. Y. Wen, and H. Y. Yang, “Effect of fabrication characteristic of 2–d microaccelerometer on performance,” Journal of Functional Materials and Devices, Vol. 14, pp. 331–335, 2008.
- Y. Liu, Z. Y. Wen, L. Q. Zhang, et al, “Structure design and system simulation of 2–d microaccelerometer,” ISTM05, Vol. 3, pp. 2071–2075.
- N. Zeng, “Research on the key technology of fiber optic accelerometers,” Doctor Thesis, Tsinghua University, pp. 97–100, 2005.