In the present paper, some novel opportunities for the development of high-efficient Si and III-V-based solar cells are considered: energy-saving environment friendly low-temperature technology of forming p - n junctions in Si (1), elaboration of structurally perfect GaAs/Ge/Si epitaxial substrates (2) and application of protective antireflecting coatings based on cubic zirconia (3). As a result: 1) New technique of forming p - n junctions in silicon has been elaborated. The technique provided easy and comparatively cheap process of production of semiconductor devices such as solar cells. The essence of the technique under the study is comprised in formation p - n junctions in silicon by a change of conductivity in the bulk of the sample occurring as a result of redistribution of the impurities, which already exists in the sample before its processing by ions. It differs from the techniques of diffusion and ion doping where change of conductivity and formation of p - n junction in the sample occur as a result of introduction of atoms of the other dopants from the outside; 2) The conditions for synthesis of GaAs/Ge/Si epitaxial substrates with a thin (200 nm) Ge buffer layer featured with (1 - 2) × 10 5 cm -2 density of the threading dislocation in the GaAs layer. Ge buffer was obtained by chemical vapor deposition with a hot wire and GaAs layer of 1 μm thick was grown by the metal organic chemical vapor deposition. Root mean square surface roughness of GaAs layers of the less than 1 nm and good photoluminescence properties along with their high uniformity were obtained; 3) The conditions ensuring the synthesis of uniform functional (buffer, insulating and protective) fianite layers on Si and GaAs substrates by means of magnetron and electron-beam sputtering have been determined. Fianite films have been shown to be suitable for the use as an ideal anti-reflecting material with high protective and anticorrosive properties.
KeywordsSolar CellsGreen Technologiesp-n JunctionsAr Ion-IrradiationInversion of ConductivitySiliconIII-VGaAs on Si
Kramer, H.G. (1981) The Selection of Starting Material for Neutron-Transmutation Doped Silicon. In: Caldberg, J., Ed., Neutron-Transmutation-Doped Silicon, Plenum Publishing Corporation, New York, 207-210.
Luk’yanov, A.E., Buzynin, A.N., Butylkin, A.I. and Butylkina, N.A. (1992) SEM Investigation of p-n Junction in Homogeneous p-Si. Scanning, 14, 358-359. https://doi.org/10.1002/sca.4950140608
Buzynin, A.N., Luk’yanov, A.E., Osiko, V.V. and Voronkov, V.V. (1995) Inversion of Conductivity in p-Si after Ion Treatment. Materials Research Society Symposium Proceedings,Pittsburg, PA, 378, 653-658.
Buzynin, A.N., Luk’yanov, A.E., Osiko, V.V. and Voronkov, V.V. (2002) Non-Equilibrium Impurity Redistribution in Si. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 186, 366- 370. https://doi.org/10.1016/S0168-583X(01)00882-5
Pichler, P. (2004) Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon. Computational Microelectronics. Springer-Verlag, Wien, 77-227. https://doi.org/10.1007/978-3-7091-0597-9
Popov, V.M., Shustov, Yu.M., Klimenko, A.S. and Pokanevich., A.P. (2009) Influence of Irradiation of Silicon by Low-Energy Ar Ions on the Formation of Electrically-Active Defects in It. Technology and Design in Electronic Equipment, 4, 48- 51. (In Russian)
Zhou, H.P., Xu, L.X., Xu, S., Huang, S.Y., Wei, D.Y., Xiao, S.Q., Yan, W.S. and Xu, M. (2010) On Conductivity Type Conversion of p-Type Silicon Exposed to a Low-Frequency Inductively Coupled Plasma of Ar + H2. Journal of Physics D: Applied Physics, 43, Article No: 505402. https://doi.org/10.1088/0022-3727/43/50/505402
Xiao, S.Q., Xu, S. and Ostricov, K. (2014) Low-Temperature Plasma Processing for Si Photovoltaics. Materials Science and Engineering: R: Reports, 78, 1-29. https://doi.org/10.1016/j.mser.2014.01.002
Mikoushkin, V.M., Bryzgalov, V.V., Nikonov, S.Yu., Solonitsyna, A.P. and Marchenko, D.E. (2016) Formation of a p-n Junction on the GaAs-Surface by an Ar+ Ion Beam. Materials Science. https://arxiv.org/ftp/arxiv/papers/1612/1612.06798.pdf
Buzynin, A.N., Osiko, V.V., Luk'yanov, A.E. and Butylkina, N.A. (2014) New Ecologic Technique of P-N Junctions Fabrication in Si for Solar Cells. Science Postprint, 1, Article No: e00025. http://www.spp-j.com/spp/1-1/spp.2014.06A0002
Ge Buffer
YSZ
Antireflection Coatings
Buzynin, A.N., Osiko, V.V., Luk'yanov, A.E. and Butylkina, N.A. (2006) Method for Forming P-N Junction in Si Using Ion Beam for Simplifying the Process and Reducing Fabrication Costs. Korea Patent No. 1020050072554. http://www.directorypatent.com/KR/1020050072554.html
Samavedam, S.B., Currie, M.T., Langdo, T.A. and Fitzgerald, E.A. (1998) High-Quality Germanium Photodiodes Integrated on Silicon Substrates Using Optimized Relaxed Graded Buffers. Applied Physics Letters, 73, 2125. https://doi.org/10.1063/1.122399
Bolkhovityanov, Yu.B. and Pchelyakov, O.P. (2009) III-V Compounds-on-Si: Heterostructure Fabrication, Application and Prospects. The Open Nanoscience Journal, 3, 20. https://doi.org/10.2174/1874140100903010020
Jain, N. and Hudait, M.K. (2013) Impact of Threading Dislocations on the Design of GaAs and InGaP/GaAs Solar Cells on Si Using Finite Element Analysis. IEEE Journal of Photonoltaics, 3, 528. https://doi.org/10.1109/JPHOTOV.2012.2213073
Jain, N. and Hudait, M.K. (2014) III-V Multijunction Solar Cell Integration with Silicon: Present Status, Challenges and Future. Energy Harvesting and Systems, 1, 121-145. https://doi.org/10.1515/ehs-2014-0012
Sheftal, N.N. and Buzynin, A.N. (1972) Predominant Orientation of Crystals on a Substrate and the Effect of Scratches. Vestnik Moskovskogo Universiteta, 4, 102-104.
Sheftal, N.N., Klykov, V.I. Kokorish, N.P., Buzynin A.N. and Smorodina, T.A. (1974) The Method of Epitaxial Growth of Single-Crystal Layers on a Non-Orienting Substrate. USSR Patent No. 538639.
Smith, H.I. and Flanders, D.C. (1978) Oriented Crystallization on Amorphous Substrates Using Artificial Surface-Relief Gratings. Applied Physics Letters, 32, 349-351. https://doi.org/10.1063/1.90054
Mori, H. (1981) 2-D Grating Graphoepitaxy of Silicon Films from Silicon-Gold Supersaturated Solution. Japanese Journal of Applied Physics, 20, L905-L908.
Givargizov, E.I. (1994) Artificial Epitaxy (Graphoepitaxy). In: Hurle, D.T.J., Ed., Handbook of Crystal Growth, Volume 3A-3B, Thin Films and Epitaxy, 2nd Edition, Elsevier, Amsterdam, 941-995.
Ferraro, M.E., Truskett, T.M. and Bonnecaze, R.T. (2016) Graphoepitaxy for Translational and Orientational Ordering of Monolayers of Rectangular Nanoparticles, Physical Review, 93, Article ID: 032606. https://doi.org/10.1103/physreve.93.032606
Buzynin, Yu., Shengurov, V., Zvonkov, B., Buzynin, A., Denisov, S., Baidus, N., Drozdov, M., Pavlov, D. and Yunin, P. (2017) GaAs/Ge/Si Epitaxial Substrates: Development and Characteristics. AIP Advances, 7, Article ID: 015304. https://doi.org/10.1063/1.4974498
Bogumilowicz, Y., Hartmann, J.M., Rochat, N., Salaun, A., Martin, M., Bassani, F., Baron, T., David, S., Bao, X.-Y. and Sanchez, E. (2016) Threading Dislocations in GaAs Epitaxial Layers on Various Thickness Ge Buffers on 300 mm Si Substrates. Journal of Crystal Growth, 453, 180. https://doi.org/10.1016/j.jcrysgro.2016.08.022
Wen, L., Gao, F., Zhang, X., Zhang, S., Li, J., Guan, Y., Wang, W., Zhou, S., Lin, Z. and Li, G. (2014) Effect of InGaAs Interlayer on the Properties of GaAs grown on Si (111) Substrate by Molecular Beam Epitaxy. Journal of Applied Physics, 116, Article ID: 193508.
Kohen, D., Made, R.I., Bao, S., Lee, K.H., Lee, K.E.K., Tan, C.S., Yoon, S.F. and Fitzgerald, E.A. (2015) Fabrication of III-V Virtual Substrate on 200 mm Silicon for III-V and Si Devices Integration. CS MANTECH Conference, Scottsdale, Arizona, 18-21 May 2015, 75.
Buzynin, A. (2012) Fianite in Photonics. In: Hallman, D., Ed., Advanced Photonic Sciences, In Tech Europe, Croatia, 133-176. https://www.intechopen.com/books/advanced-photonic-sciences/fianite-in-photonics https://doi.org/10.5772/28812
Buzynin, A.N., Buzynin, Y.N., Osiko, V.V., Panov, V.A., et al. (2011) Antireflection Fianite and ZrO2 Coatings for Solar Cells. Bulletin of the Russian Academy of Sciences: Physics, 75, 1213-1216. https://doi.org/10.3103/S106287381109005X
Buzynin, A.N., Osiko, V.V., Buzynin, Yu.N., Zvonkov, B.N. and Zaslavski V.Y. (2010) Solar Cell. Russia Patent No. 99243.
Buzynin, A.N., Buzynin, Yu.N. and Panov, V.A. (2012) Applications of Fianite in Electronics. Advances in OptoElectronics, 2012, Article ID: 907560. http://www.hindawi.com/journals/aoe/2012/907560/ https://doi.org/10.1155/2012/907560
Hill, T. and Huang, H. (2011) Fabricating Pinhole-Free YSZ Sub-Microthin Films by Magnetron Sputtering for Micro-SOFCs. International Journal of Electrochemistry, 2011, Article ID: 479203. https://doi.org/10.4061/2011/479203
Park, J., Lee, Y., Chang, I., Cho, G.Y., Ji, S., Lee, W. and Cha, S.W. (2016) Atomic Layer Deposition of Yttria-Stabilized Zirconia Thin Films for Enhanced Reactivity and Stability of Solid Oxide Fuel Cells. Energy, 116, 170-176. https://doi.org/10.1016/j.energy.2016.09.094
Qi, N., Sharma, W.J., Fretwell, R., Chen, J., Lee, X., Banerjee, J.C. and Electrical, S. (2000) Properties of ZrO2 Gate Dielectric on SiGe. Applied Physics Letters, 76, 502-504. https://doi.org/10.1063/1.125801
Uzum, A., Kuriyama, M., Kanda, H., et al. (2017) Sprayed and Spin-Coated Multilayer Antireflection Coating Films for Nonvacuum Processed Crystalline Silicon Solar Cells. International Journal of Photoenergy, 2017, Article ID: 3436271. https://doi.org/10.1155/2017/3436271