This paper considers the analytical dynamics with simplified Dahl hysteresis model for a three-axis piezoactuated micro/nano flexure stage. An adaptive controller with nonlinear dynamic hysteresis observer is proposed using Lyapunov stability theory. In the controller, a fuzzy function approximator with parameters update law is included to compensate for the identification inaccuracy, model uncertainty, and flexure coupling effects. Simulation results are used to demonstrate the control performance.
KeywordsMicro/Nano StageAdaptive Fuzzy ControlHysteresis ObserverFuzzy Function Approximator
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