A Hybrid Structure of Dual Stators and a Pneumatic Spring for Resonance Control in an Air Mount
- 1 Smart System Research Group, KITECH, CheonAn, South Korea;
- 2 Smart System Research Group, KITECH, CheonAn, South Korea
- 3 Smart System Research Group, KITECH, CheonAn, South Korea
- 4 Shock and Vibration Team, KIMM, DaeJeon, South Korea;
- 5 Structure Dynamic Design Group, RMS Technology, CheonAn, South Korea.
Abstract
An active device using electromagnetic forces was constructed and examined for the purpose of minimizing the resonance in air mounts of clean rooms. The air mounts are vulnerable to low-frequency resonance due to heavy weight and low stiffness. A hybrid structure of the active device, composed of pneumatic and electromagnetic parts, was developed and tested. The pneumatic parts in the device support heavy weights under the air mounts, and the electromagnetic parts reduce the resonance. The electromagnetic parts are composed of dual stators and an armature, which surround the pneumatic parts. The resonance can decrease when electromagnetic forces are generated in the gaps between the stators and the armature. Four active devices were installed under a 3-ton surface plate for a vibration test apparatus. The vibration was detected by eddy-current sensors. Discrete P Control logic was based on displacement, and embedded in a C6713 DSP. The results from impact tests show that the peak magnitude in the resonance frequency can be reduced to – 10 dB.
- D. K Han and P. H. Chang, “A Robust Two-Time-Scale Control Design for a Pneumatic Vibration,” Proceedings of 46th IEEE Conference on Decision and Control, New Orleans, 12-14 December 2007, pp. 1666-1672.
- Y. C. Zhong, Q. J. Yang and G. Bao “Nonlinearity Analyses of Pneumatic Vibration Isolation System with Simple Harmonic Excitations,” Proceedings of 3rd IEEE Computer Science and Information Technology, Chengdu, 9-11 July 2010, pp. 814-817
- P. H. Chang, D. K. Han, Y. H. Shin and K. J. Kim “Effective Suppression of Pneumatic Vibration Isolators by Using Input-Output Linearization and Time Delay Control,” Journal of Sound and Vibration, Vol. 329, No. 10, 2010, pp. 1636-1652. .
- L. Zuo and J. E. Slotine, “Effective Robust Vibration Isolation via Frequency-Shaped Sliding Control and Modal Decomposition,” Journal of Sound and Vibration, Vol. 285, No. 4-5, 2005, pp. 1123-1149.
- T. Mizuno, M Takasaki., D. Kishita and K. Hirakawa, “Vibration Isolation System Combining Zero Power Magnetic Suspension with Springs,” Control Engineering Practice, Vol. 15, No. 2, 2007, pp. 187-196.
- D. Jones and R. Owen, “A Magnetically Levitated AntiVibration Mount,” IEEE Transactions on Magnetics, Vol. 20, No. 5, 1984, pp. 1687-1689.
- H. T. Kim, C. H. Kim, K. W. Lee, G. S. Lee and S. W. Son, “An Electro-Magnetic Air Spring for Vibration Control in Semiconductor Manufacturing,” Transactions of the KSNVE, Vol. 20, No. 12, 2010, pp. 1128-1138.
- H. T. Kim, C. H. Kim, S. B. Kang, K. W. Lee, J. H. Baek and H. H. Han, “Control of Air Mount Combined with Electro-Magnetics and MR,” Proceedings of the KSNVE Annual Spring Conference, 2011, pp. 27-29.
- H. T. Kim, C. H. Kim, S. B. Kang, K. W. Lee, J. H. Baek and H. H. Han, “A 3 DOF Model for an Electro Magnetic Air Mount,” Advances in Acoustics and Vibration, Vol. 2012, 2012, Article ID: 218429.
- K. Watanabe, Y. Kanemitsu, N. Haga and M. Suzuki, “Vibration Resistance Device,” Japan Patent 07353956, 1995.
- S. J. Moon, S. H. Park, J. A. Jeong, Y. C. Huh, C. H. Kim and S. M. Choi, “A Study on the Development of a Hybrid Electromagnetic Actuator Against Microvibration,” Transactions of the KSNVE, Vol. 21, No. 5, 2011, pp. 475-483.