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High-Sensitivity Ozone Sensing Using 280 nm Deep Ultraviolet Light-Emitting Diode for Detection of Natural Hazard Ozone
Ritsumeikan University, Global Innovation Research Organization
Ritsumeikan University, Global Innovation Research Organization
Ritsumeikan University, Global Innovation Research Organization
Ritsumeikan University, Global Innovation Research Organization
Ritsumeikan University, Faculty of Engineering Science, 1-1-1, Noji-higashi, Shiga, Japan
Ritsumeikan University, Faculty of Engineering Science, 1-1-1, Noji-higashi, Shiga, Japan
Hikari Tec; 4Miura-ori Lab., 1687, kanamori, Machida, Tokyo, Japan
Miura-ori Lab., 1687, kanamori, Machida, Tokyo, Japan
Tokyo Metropolitan Industrial Technology Research Institute 3-13-10, Nishigaoka, Kitaku, Tokyo, Japan
- 1 Ritsumeikan University, Global Innovation Research Organization
- 2 Ritsumeikan University, Global Innovation Research Organization
- 3 Ritsumeikan University, Global Innovation Research Organization
- 4 Ritsumeikan University, Global Innovation Research Organization
- 5 Ritsumeikan University, Faculty of Engineering Science, 1-1-1, Noji-higashi, Shiga, Japan
- 6 Ritsumeikan University, Faculty of Engineering Science, 1-1-1, Noji-higashi, Shiga, Japan
- 7 Hikari Tec; 4Miura-ori Lab., 1687, kanamori, Machida, Tokyo, Japan
- 8 Miura-ori Lab., 1687, kanamori, Machida, Tokyo, Japan
- 9 Tokyo Metropolitan Industrial Technology Research Institute 3-13-10, Nishigaoka, Kitaku, Tokyo, Japan
Journal of Environmental Protection·Volume 03 (2012)·Pages 695–699·Published 20 August 2012·DOI10.4236/jep.2012.38082
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Abstract
Recently ozone is one of natural hazards which comes from cars, industry using ozone for sterilization of organic and inorganic materials and for water purification. So, ozone sensing becomes very important, and convenient and accurate ozone sensor is required. A new high sensitivity ozone sensing system using an deep ultra-violet light emitting diode (DUV-LED) operated at the wavelength of 280 nm has been successfully constructed. The fabrication of diode operated at 280 nm is much easier than that of DUV-LED operated at Hg lamp wavelength of 254 nm. The system is compact and possible to sense the ozone concentration less than 0.1 ppm with an accuracy of 0.5% easily with low power DUV-LED of around 200 micro Watts operated at 280 nm without any data processing circuit.
KeywordsOzone SensingDeep Ultra Violet Light Emitting DiodeDUV-LEDHigh SensitivityLong LifeCompact
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