Development of a Low Cost Pulsed Laser Deposition System for Thin Films Growth
- 1 Centro Láser de Ciencias Moleculare, Departamento de Fisicoquímica, Facultad de Ciencias Químicas, Universidad Nacional de Córdoba, Ciudad Universitaria, Córdoba, Argentina
- 2 Grupo de Ciencia de Materiales, Facultad de Matemática Astronomía y Física, Universidad Nacional de Córdoba, Ciudad Universitaria, Córdoba, Argentina
- 3 Centro Láser de Ciencias Moleculare, Departamento de Fisicoquímica, Facultad de Ciencias Químicas, Universidad Nacional de Córdoba, Ciudad Universitaria, Córdoba, Argentina
- 4 Grupo de Ciencia de Materiales, Facultad de Matemática Astronomía y Física, Universidad Nacional de Córdoba, Ciudad Universitaria, Córdoba, Argentina
- 5 Instituto de Física Enrique Gaviola, Consejo Nacional de Investigaciones Científicas y Técnicas (CONICET), Córdoba, Argentina
Abstract
.Pulsed Laser Deposition (PLD) is a powerful technique to grow thin films. Oxides, Magnetics and superconducting materials have been obtained by PLD and theirs properties are strongly dependent of deposition parameters. The construction of a simple and cheap PLD system that is suitable for growing various thin films, including magnetic materials, controlling some deposition parameters is presented. The design characteristics and construction are presented for each one of the devices that compose this PLD system. The equipment has the possibility of carrying out films deposition using up to five targets under controlled atmosphere and substrate temperature. The system also allows controlling the cool off sample time after growing up films at high temperatures. A wide range of relative speeds between target and substrate axial rotation can be externally controlled. With the configuration and the dimensions adopted in their construction, a PLD system of great experimental flexibility is achieved, at a very low cost regarding the commercial systems. To evaluate their performance and effectiveness, the deposition characteristics of a BaFe 12 O 19 film on (0001) sapphire substrate is presented.
- M. S. Yuan, H. L. Glass and L. R. Adkins, “Epitaxial Barium Hexaferrite on Sapphire by Sputter Deposition,” Applied Physics Letters, Vol. 53, No. 4, 1988, pp. 340-341.
- B. Y. Wong, X. Sui, D. E. Laughlin and M. H. Kryder, “Microstructural Investigations of Barium Ferrite Longitudinal Thin-Film Media,” Journal of Applied Physics, Vol. 75, No. 10, 1994, pp. 5966-5968. doi:10.1063/1.355527
- C. Surig, K. A. Hempel and D. Bonnenberg, “Formation and Microwave Absorption of Barium and Strontium Ferrite Prepared by Sol-Gel Technique,” Applied Physics Letters, Vol. 63, No. 20, 1993, pp. 2836-2838. doi:10.1063/1.110303
- J. D. Adam, S. V. Krishnaswamy, S. H. Talisa and K. C. Yoo, “Thin-Film Ferrites for Microwave and Millimeter-Wave Applications,” Journal of Magnetism and Magnetic Materials, Vol. 83, No. 1-3, 1990, pp. 419-424. doi:10.1016/0304-8853(90)90570-G
- J. J. Coleman, “Metalorganic Chemical Vapor Deposition for Optoelectronic Devices,” Proceedings of the IEEE, Vol. 85, No. 11, 1997, pp. 1715-1729. doi:10.1109/5.649647
- T. Frey, C. C. Chi, C. C. Tsuei, T. Shaw and F. Bozso, “Effect of Atomic Oxygen on the Initial Growth Mode in Thin Epitaxial Cuprate Films” Physical Review B, Vol. 49, No. 5, 1994, pp. 3483-3491. doi:10.1103/PhysRevB.49.3483
- P. R. Wilmott and J. R. Huber, “Pulsed Laser Vaporization and Deposition”, Reviews of Modern Physics, Vol. 72, No. 1, 2000, pp. 315-328. doi:10.1103/RevModPhys.72.315
- S. Metev, “Pulsed Laser Deposition of Thin Films,” In: D. Chrisey and G. Hubler, Eds., Process Characteristics and Film Properties in Pulsed Laser Plasma Deposition, Wiley, New York, 1994, p. 255.
- K. H. Wu, J. Y. Juang., C. L. Lee, T. C, Lai, T. M. Uen, Y. S. Gou, S. L. Tu, S. J. Yang and S. E. Hsu, “Optimization of Depositier Ablation Plumes Measured by Fast Intensified Charge Coupled Device Photographs,” Nuclear Instruments and Methods in Physics, Vol. 116, No. 3-4, 1996, pp. 257-261.
- D. Baüerle, “Laser Processing and Chemistry”, 3rd Edition, Springer, Berlin, 2000.
- S. Fähler, M. Störmer and H. U. Krebs, “Origin and Avoidance of Droplets During Laser Ablation of Metals” Applied Surface Science, Vol. 109-110, 1997, pp. 433-436. doi:10.1016/S0169-4332(96)00782-9
- M. I. Oliva, F. A. Soria1, C. I. Zandalazini, C. A. Rinaldi and J. C. Ferrero, “Spectroscopic Study of the Pulsed Laser Ablation on Ba/Sr Ferrites,” Anales Asosciación Física Argentina, Vol. 19, 2007, p. 79.