In this study, the radio-frequency (RF) sputtering of cerium oxide was explored to determine the effect of the operating conditions on the film growth of cerium oxide on glass, and silicon substrates. The process variables were sputtering time, input power and R (Ar/O 2 ) ratio. In order to better understand the influence of process variables on the growth mechanism, the grain size and film thickness of cerium oxides were explored by using SEM, XRD, and α -step processes. From the results of SEM photographs, the grains of cerium oxides could be evaluated by using an imaging analysis technique. On the other hand, from the XRD data, with the aid of Scherrer’s equation, the crystalline sizes of cerium oxide crystals could be determined. The grain size was higher than the primary size, indicating the agglomeration of cerium oxide crystals. In addition, the effects of parameters on crystal size and film thickness are discussed herein following regression.
Channei, D., Nakaruk, A., Phanichphant, S., Koshy, P. and Sorrell, C.C. (2013) Cerium Dioxide Thin Films Using Spin Coating. Journal of Chemistry, 2013, Article ID: 579284. https://doi.org/10.1155/2013/579284
Savvides, N., Thorley, A., Gnanarajan, S. and Katsaros, A. (2001) Epitaxial Growth of Cerium Oxide Thin Film Buffer Layers Deposited by D.C. Magnetron Sputtering. Thin Solid Films, 388, 177-182. https://doi.org/10.1016/S0040-6090(01)00839-2
Lavkova, J., Khalakhan, I., Chundak, M., Vorokhta, M., Potin, V., Matolin, V. and Matolinova, I. (2015) Growth and Composition of Nanostructured and Nanoporous Cerium Oxide Thin Films on Graphite Foil. Nanoscale, 7, 4038-4047. https://doi.org/10.1039/C4NR06550F
Elidrissi, B., Addou, M., Regragui, M., Monty, C., Bougrine, A. and Kachouane, A. (2000) Structural and Optical Properties of CeO2 Thin Films Prepared by Spray Pyrolysis. Thin Solid Films, 379, 23-27. https://doi.org/10.1016/S0040-6090(00)01404-8
Agrawal, K., Khairnar, A. and Mahajan, A. (2017) Preparation of Rare Earth CeO2 Thin Films Using Metal Organic Decomposition Method for Metal-Oxide-Semiconductor Capacitors. Journal of Materials Science Materials in Electronics, 28, 12503-12508. https://doi.org/10.1007/s10854-017-7072-6
Ahmed, W., Sein, H. and Jackson, M.J. (2005) CVD Diamond Technology for Microtools, NEMS, and MEMS Applications. Microfabrication and Nanomanufacturing, Chapter 7, 195.
Kim, J.J., Lee, J.H., Lee, J.Y., Lee, D.J., Jang, B.R. and Kim, H.S. (2009) Characteristics of ZnO Films Deposited on Plastic Substrates at Various RF Sputtering Powers. Journal of the Korean Physical Society, 55, 1910-1914. https://doi.org/10.3938/jkps.55.1910
Boiadjiev, S.I., Rasovska, M.M.M. and Iordanov, R.S. (2005) RF Reactive Sputtering of MoO3 Thin Films for Sensor Applications. Electronics, Sozopol, 21-23 September 2005, 1-5.
Huang, K.L., Lai, Y.C. and Tsai, C.H. (2006) Effects of Sputtering Parameters on the Performance of Electrodes Fabricated for Proton Exchange Membrane Fuel Cells. Journal of Power Sources, 156, 224-231. https://doi.org/10.1016/j.jpowsour.2005.05.088
Ta, M.T., Briand, D., Guhel, Y., Bernard, J., Pesant, J.C. and Boudart, B. (2008) Growth and Structural Characterization of Cerium Oxide Thin Films Realized on Si(111) Substrates by On-Axis R.F. Magnetron Sputtering. Thin Solid Films, 517, 450-452. https://doi.org/10.1016/j.tsf.2008.08.059
Trinchi, A., Li, Y.X., Wlodarski, W., Kaciulis, S., Pandolfi, L., Viticoli, S., Comini, E. and Sberveglieri, G. (2003) Investigation of Sol-Gel Prepared CeO2-TiO2 Thin Films for Oxygen Gas Sensing. Sensors and Actuators B, 95, 145-150. https://doi.org/10.1016/S0925-4005(03)00424-6
Putna, E.S., Stubenrauch, J., Vohs, J.M. and Gorte, R.J. (1995) Ceria-Based Anodes for the Direct Oxidation of Methane in Solid Oxide Fuel Cells. Langmuir, 11, 4832. https://doi.org/10.1021/la00012a040
Marina, O.A., Bagger, C., Primdahl, S. and Mogensen, M. (1999) A Solid Oxide Fuel Cell with a Gadolinia-Doped Ceria Anode: Preparation and Performance, Solid State Ionics, 123, 199-208. https://doi.org/10.1016/S0167-2738(99)00111-3
Lakhotia, S.R., Mukhopadhyay, M. and Kumari, P. (2018) Cerium Oxide Nanoparticles Embedded Thin-Film Nanocomposite Nanofiltration Membrane for Water Treatment. Scientic Reports, 8, Article No. 4976. https://doi.org/10.1038/s41598-018-23188-7
Kim, N.H. and Kim, H.W. (2004) Room Temperature Growth of Zinc Oxide Films on Si Substrates by the RF Magnetron Sputtering. Materials Letters, 58, 938-943. https://doi.org/10.1016/j.matlet.2003.07.040
Lu, Y.M., Hwang, W.S., Liu, W.Y. and Yang, J.S. (2001) Effect of RF Power on Optical and Electrical Properties of ZnO Thin Film by Magnetron Sputtering. Materials Chemistry and Physics, 72, 269-272. https://doi.org/10.1016/S0254-0584(01)00450-3
Sultana, S. (2010) RF Magnetron Sputtering System. Centre for Excellence in Nano-Electronics, Indian Institute of Science, Bangalore, 12.
Izu, N., Shin, W. and Murayama, N. (2003) Fast Response of Resistive-Type Oxygen Gas Sensors Based on Nano-Sized Ceria Powder. Sensors and Actuators B, 93, 449-453. https://doi.org/10.1016/S0925-4005(03)00167-9
Beie, H.J. and Gnorich, A. (1991) Oxygen Gas Sensors Based on CeO2 Thick and Thin Films. Sensors and Actuators B, 4, 393-399. https://doi.org/10.1016/0925-4005(91)80141-6
Millot, F. and De Mierry, P. (1985) A New Method for the Study of Chemical Diffusions in Oxides with Applications to Cerium Oxide. Journal of Physics and Chemistry of Solids, 46, 797-801. https://doi.org/10.1016/0022-3697(85)90003-4
Gerblinger, J., Lohwasser, W., Lampe, U. and Meixner, H. (1995) High Temperature Oxygen Sensor Based on Sputtered Cerium Oxide. Sensors & Actuators, B, 26-27, 93-96. https://doi.org/10.1016/0925-4005(94)01564-X
Izu, N., Shin, W. and Murayama, H. (2002) Resistive Oxygen Gas Sensors Based on CeO2 Fine Powder Prepared Using Mist Pyrolysis. Sensors & Actuators, B, 87, 95-98. https://doi.org/10.1016/S0925-4005(02)00224-1
Kamiya, M., Shimada, E., Ikuma, Y., Komatsu, M. and Hanada, H. (2000) Intrinsic and Extrinsic Oxygen Diffusion and Surface Exchange Reaction in Cerium Oxide. Journal of the Electrochemical Society, 147, 1222-1227. https://doi.org/10.1149/1.1393340
Varhegyi, E.B., Perczel, I.V., Gerblinger, J., Fleischer, M., Meixner, H. and Giber, J. (1994) Auger and SIMS Study of Segregation and Corrosion Behavior of Some Semiconducting Oxide Gas Sensor Materials. Sensors & Actuators, B, 18-19, 569-572. https://doi.org/10.1016/0925-4005(93)01088-L
Golunski, S.E., Hatcher, H.A., Rajaram, R.P. and Truex, T.J. (1995) Origins of Low-Temperature Three-Way Activity in Pt/CeO2. Applied Catalysis B: Environmental, 5, 367-376. https://doi.org/10.1016/0926-3373(94)00057-3
Wang, S., Wang, W., Liu, Q., Zhang, M. and Qian, Y. (2000) Preparation and Characterization of Cerium (IV) Oxide Thin Films by Spray Pyrolysis Method. Solid State Ionics, 133, 211-215. https://doi.org/10.1016/S0167-2738(00)00762-1
Arul, N.S., Mangalaraj, D., Chen, P.C., Ponpandian, N. and Viswanathan, C. (2011) Self Assembly of Co Doped CeO2 Microspheres from Nanocubes by Hydrothermal Method and Their Photo-degradation Activity on AO7. Materials Letters, 65, 3320-3322. https://doi.org/10.1016/j.matlet.2011.07.017
Arul, N.S., Mangalaraj, D., Chen, P.C., Ponpandian, N. and Viswanathan, C. (2011) Strong Quantum Confinement Effect in Nanocrystalline Cerium Oxide. Materials Letters, 65, 2635-2638. https://doi.org/10.1016/j.matlet.2011.05.022
Gtoh, K., Masuda, H. and Higashitani, K. (1997) Powder Technology Handbook: IV. Crystallization. 2nd Edition, Marcel Dekker, Inc., New York, 459.
Sohn, H., Lee, B.J. and Cho, Y.T. (2007) The Effect of the RF-Sputtering Condition on the ZrO2 Thin Film’s Characteristics. Journal of the Korean Physical Society, 51, 1038-1041. https://doi.org/10.3938/jkps.51.1038