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High Moisture Sensitivity of the Elements Based on Carbon Nanotubes Array
Ulyanovsk State University, Ulyanovsk, Russia
Scientific Manufacturing Complex “Technological Centre”, Moscow, Russia
National Research University of Electronic Technology (MIET), Moscow, Russia
Ulyanovsk State University, Ulyanovsk, Russia
nstitute of Nanotechnology of Microelectronics RAS, Moscow, Russia
Scientific Manufacturing Complex “Technological Centre”, Moscow, Russia
- 1 Ulyanovsk State University, Ulyanovsk, Russia
- 2 Scientific Manufacturing Complex “Technological Centre”, Moscow, Russia
- 3 National Research University of Electronic Technology (MIET), Moscow, Russia
- 4 Ulyanovsk State University, Ulyanovsk, Russia
- 5 nstitute of Nanotechnology of Microelectronics RAS, Moscow, Russia
- 6 Scientific Manufacturing Complex “Technological Centre”, Moscow, Russia
Materials Sciences and Applications·Volume 04 (2013)·Pages 8–10·Published 21 May 2013·DOI10.4236/msa.2013.45A002
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Abstract
The results of the research and development of the moisture-sensitive elements based on the carbon nanotubes (CNT) array are presented. It was shown that CNT arrays that were grown by low-temperature plasma enhanced chemical va por deposition ( PECVD) method on the planar Si structures exhibit extremely high moisture sensitivity. The structure resistance ratio in dry and moisture conditions exceed 400. Such relatively high change in resistances is conditioned by the pattern of change of the charge carrier’s conductivity between certain nanotubes in the bundle when water mole cules adsorption occurs.
KeywordsCarbon NanotubesMoisture-Sensitive ElementsConductivityMolecules Adsorption
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