Hexagonal Nano-Crystalline BCN Films Grown on Si (100) Substrate Studied by X-Ray Absorption Spectroscopy — Oak Academic Publishing
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Hexagonal Nano-Crystalline BCN Films Grown on Si (100) Substrate Studied by X-Ray Absorption Spectroscopy
Department of Chemistry and Applied Chemistry, Faculty of Science and Engineering, Saga University, Saga, Japan; Synchrotron Radiation Research Unit, Quantum Beam Science Directorate, Japan Atomic Energy Agency, Ibaraki, Japan
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Synchrotron Radiation Research Unit, Quantum Beam Science Directorate, Japan Atomic Energy Agency, Ibaraki, Japan
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Synchrotron Radiation Research Unit, Quantum Beam Science Directorate, Japan Atomic Energy Agency, Ibaraki, Japan
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Department of Chemistry and Applied Chemistry, Faculty of Science and Engineering, Saga University, Saga, Japan
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Department of Chemistry and Applied Chemistry, Faculty of Science and Engineering, Saga University, Saga, Japan
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Department of Chemistry and Applied Chemistry, Faculty of Science and Engineering, Saga University, Saga, Japan
1 Department of Chemistry and Applied Chemistry, Faculty of Science and Engineering, Saga University, Saga, Japan; Synchrotron Radiation Research Unit, Quantum Beam Science Directorate, Japan Atomic Energy Agency, Ibaraki, Japan
2 Synchrotron Radiation Research Unit, Quantum Beam Science Directorate, Japan Atomic Energy Agency, Ibaraki, Japan
3 Synchrotron Radiation Research Unit, Quantum Beam Science Directorate, Japan Atomic Energy Agency, Ibaraki, Japan
4 Department of Chemistry and Applied Chemistry, Faculty of Science and Engineering, Saga University, Saga, Japan
5 Department of Chemistry and Applied Chemistry, Faculty of Science and Engineering, Saga University, Saga, Japan
6 Department of Chemistry and Applied Chemistry, Faculty of Science and Engineering, Saga University, Saga, Japan
Hexagonal nano-crystalline boron carbonitride ( h- BCN) films grown on Si (100) substrate have been precisely investi gated. The films were synthesized by radio frequency plasma enhanced chemical vapor deposition using tris-dime thylamino borane as a single-source molecular precursor. The deposition was performed by setting RF power at 400 - 800 W. The reaction pressure was at 2.6 Pa and the substrate temperature was recorded at 700° C - 800° C. Formation of the nano-crystalline h- BCN compound has been confirmed by X-ray diffraction analysis. The diffraction peaks at 26.3° together with a small unknown peak at 29.2° were elucidated due to the formation of an h- BCN structure. The films composed of B, C, and N atoms with different B-N, B-C, C-N chemical bonds in forming the sp 2 -BCN atomic con figuration studied by X-ray photoelectron spectroscopy. Orientation and local structures of the h- BCN hybrid were studied by near-edge X-ray absorption fine structure (NEXAFS) measurements. The dominant presence of p * and s * resonance peaks of the sp 2 -hybrid orbitals in the B K -edge NEXAFS spectra revealed the formation of the sp 2 -BCN configuration around B atoms like-BN 3 in h- BN. The orientation was suggested on the basis of the polarization de pendence of B K -edge and N K -edge of the NEXAFS spectra.
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