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Forming Stages of Polycrystalline TiN Films Depending on the Nitrogen Concentration in Mixed Gas
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Materials Sciences and Applications·Volume 02 (2011)·Pages 6–13·Published 25 January 2011·DOI10.4236/msa.2011.21002
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Abstract
The influence of nitrogen concentration in mixed gas on temperature conditions, structure and phase composition of the TiN film deposited by arc spraying has been investigated. By electron microscopic investigations and X-ray diffraction phase analysis was recognized forming stages and structuring process of the film with main cubic phase (111) TiN. It was discovered that forming stages and process of structuring of ion-plasma TiN films are affected by both film temperature and its rate of heating.
KeywordsPolycrystalline TiN FilmArc SprayingTemperature ConditionsForming StagesStructure and Phase Modification
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