Deposition of Titanium Layer on Steel Substrate Using PECVD Method: A Parametric Study

1. ¹ Surface Engineering Laboratory, Materials Engineering Department, Faculty of Engineering, Tarbiat Modares University, Tehran, Iran
2. ² Surface Engineering Laboratory, Materials Engineering Department, Faculty of Engineering, Tarbiat Modares University, Tehran, Iran
3. ³ Advanced Materials & Renewable Energies Department, Iranian Research Organization for Science and Technology, Tehran, Iran
4. ⁴ Surface Engineering Laboratory, Materials Engineering Department, Faculty of Engineering, Tarbiat Modares University, Tehran, Iran
5. ⁵ Surface Engineering Laboratory, Materials Engineering Department, Faculty of Engineering, Tarbiat Modares University, Tehran, Iran
6. ⁶ Material Science and Technology, Azad University, Tehran, Iran