Effects of Si-Layer-Thickness Ratio on UV-Light-Emission Intensity from Si/SiO<SUB>2</SUB> Multilayered Thin Films Prepared Using Radio-Frequency Sputtering
- 1 Graduate School of Science and Technology, Gunma University, Kiryu, Japan
- 2 Graduate School of Science and Technology, Gunma University, Kiryu, Japan
- 3 Graduate School of Science and Technology, Gunma University, Kiryu, Japan
- 4 Graduate School of Science and Technology, Gunma University, Kiryu, Japan
Abstract
We investigated the effects of Si-layer-thickness ratios on ultraviolet (UV) peak intensities of Si/ SiO 2 multilayered films produced by alternately stacking several-nanometer-thick Si and SiO 2 layers using radio-frequency sputtering for the first time. The Si-layer-thickness ratio of the Si/SiO 2 film is a very important parameter for enhancing the peak intensity because the ratio is concerned with the size of Si nanocrystals in the film, which might affect the intensity of the UV light emission from the film. We prepared seven samples with various estimated Si-layer-thickness ratios, and measured the photoluminescence spectra of the samples after annealing at 1150°C, 1200°C, or 1250°C for 25 min. From our experiments, we estimate that the proper Si-layer-thickness ratio to obtain the strongest UV peaks from the Si/SiO 2 multilayered films is around 0.29. Such a UV-lightemitting thin film is expected to be used in future higher-density optical-disk systems.
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