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Synthesis of Hexagonal Boron Carbonitride without Nitrogen Void Defects
Department of Chemistry, University of Rajshahi, Rajshahi, Bangladesh
Synchrotron Radiation Research Unit, Quantum Beam Science Directorate, Japan Atomic Energy Agency, Ibaraki-ken, Japan
Department of Chemistry and Applied Chemistry, Saga University, Honjyo, Japan
Department of Chemistry and Applied Chemistry, Saga University, Honjyo, Japan
Department of Chemistry and Applied Chemistry, Saga University, Honjyo, Japan
Sector of Fukushima Research and Development, Japan Atomic Energy Agency, Fukushima-shi, Japan
- 1 Department of Chemistry, University of Rajshahi, Rajshahi, Bangladesh
- 2 Synchrotron Radiation Research Unit, Quantum Beam Science Directorate, Japan Atomic Energy Agency, Ibaraki-ken, Japan
- 3 Department of Chemistry and Applied Chemistry, Saga University, Honjyo, Japan
- 4 Department of Chemistry and Applied Chemistry, Saga University, Honjyo, Japan
- 5 Department of Chemistry and Applied Chemistry, Saga University, Honjyo, Japan
- 6 Sector of Fukushima Research and Development, Japan Atomic Energy Agency, Fukushima-shi, Japan
Materials Sciences and Applications·Volume 06 (2015)·Pages 353–359·Published 21 April 2015·DOI10.4236/msa.2015.65041
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Abstract
The synthesis and structure of hexagonal boron carbonitride ( h -BCN) film on polycrystalline diamond surface were reported. Polycrystalline diamond and/or diamond-like carbon were first fabricated on Si (100) and then diamond like carbon was used as substrate. The deposition was performed by radio frequency plasma enhanced chemical vapor deposition. In order to reduce the content of nitrogen void defects, the deposition was performed at the high temperature of 950°C under the working pressure of 2.6 Pa. The typical sample with atomic composition of B 31 C 37 N 26 O 6 in the h -BCN lattice was characterized by X-ray photoelectron spectroscopy. The fine structure of the film was studied by near-edge X-ray absorption fine structure (NEXAFS) measurements. The B K-edge and N K-edge of NEXAFS spectra revealed that the synthesized h -BCN film had the ideal honeycomb- like BN3 configuration without nitrogen void defects.
Keywords<i>h</i>-BCNDefectChemical Vapor DepositionXPSNEXAFS
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