The moment method in statistical (SMM) dynamics is used to study the thermodynamic quantities of ZrO 2 thin films taking into account the anharmonicity effects of the lattice vibrations. The average lattice constant, thermal expansion coefficient and specific heats at the constant volume of ZrO 2 thin films are calculated as a function of temperature, pressure and thickness of thin film. SMM calculations are performed using the Buckingham potential for the ZrO 2 thin films. In the present study, the influence of temperature, pressure and the size on the thermodynamic quantities of ZrO 2 thin film have been studied using three different interatomic potentials. We discuss temperature and thickness dependences of some thermodynamic quantities of ZrO 2 thin films and we compare our calculated results with those of the experimental results.
KeywordsThin FilmZirconiaLattice ConstantThermal Expansion CoefficientSpecific Heats at the Constant VolumeStatistical Moment Method
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