Diamond-like carbon (DLC) is a metastable amorphous film that exhibits unique properties. However, a number of limitations exist regarding the use of DLC, for instance, its tribological characteristics. In this article, the fluorine and silicon incorporated diamond-like carbon (F-DLC and Si-DLC) films are studied, taking into account the tribological properties of these films compared with pure DLC. The structures of the films were characterized using Auger electron spectroscopy and Raman spectroscopy. The hardness and elastic modulus were evaluated by nanoindentation hardness testing. The friction behavior was assessed using ball-on-disk friction testing and optical microscopy. The results indicated that the deposited DLC films contained 0.6 - 2.1 at.% F and 26.7 - 38.4 at.% Si. A decrease in the hardness and elastic modulus was obtained as F increased in content, which was the opposite of the behavior observed in the Si-DLC films. This was due to the shifting in the G-peak position, which is related to the sp3 bonding fraction in the film. When measured in ambient air, the addition of Si into the DLC film strongly influenced the friction coefficient, whereas doping with F only slightly influenced the films, as evidenced by their wear scars. In addition, only a 26.7 at.% Si-DLC film showed a very low friction coefficient when measured in dry air. This was attributed to the formation of silicon-rich transfer layer on the ball surfaces. Therefore, the addition of Si with 26.7 at.% content to a DLC film can be considered beneficial for improving tribological performance.
KeywordsFluorine IncorporationPlasma-Based Ion ImplantationSilicon IncorporationTribological Performance
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