Selective Heating of Transition Metal Usings Hydrogen Plasma and Its Application to Formation of Nickel Silicide Electrodes for Silicon Ultralarge-Scale Integration Devices

1. ¹ Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu, Japan
2. ² Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu, Japan
3. ³ Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu, Japan
4. ⁴ Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu, Japan
5. ⁵ Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu, Japan
6. ⁶ Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu, Japan
7. ⁷ Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu, Japan
8. ⁸ Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu, Japan
9. ⁹ Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu, Japan
10. ¹⁰ Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu, Japan
11. ¹¹ SST Inc., Yachiyo, Japan