Research ArticleOpen AccessGoogle Scholar indexed
Catalyst-Free Growth of Graphene by Microwave Surface Wave Plasma Chemical Vapor Deposition at Low Temperature
Department of Electronics and Information Engineering, Chubu University, Kasugai, Japan
Department of Electronics and Information Engineering, Chubu University, Kasugai, Japan
Department of Electronics and Information Engineering, Chubu University, Kasugai, Japan
Department of Electronics and Information Engineering, Chubu University, Kasugai, Japan
- 1 Department of Electronics and Information Engineering, Chubu University, Kasugai, Japan
- 2 Department of Electronics and Information Engineering, Chubu University, Kasugai, Japan
- 3 Department of Electronics and Information Engineering, Chubu University, Kasugai, Japan
- 4 Department of Electronics and Information Engineering, Chubu University, Kasugai, Japan
Journal of Materials Science and Chemical Engineering·Volume 04 (2016)·Pages 10–14·Published 9 March 2016·DOI10.4236/msce.2016.43002
Copy link · social · email
Abstract
Catalyst-free graphene films has been synthesized by microwave (MW) surface wave plasma (SWP) chemical vapor deposition (CVD) using hydrogenated carbon source on silicon substrates at low temperature (500 ℃ ). The synthesized process is simple, low-cost and possible for application on transparent electrodes, gas sensors and thin film resistors. Analytical methods such as Raman spectroscopy, transmission electron microscopy (TEM) and four points prove resistivity measurement and UV-VIS-NIR spectroscopy were employed to characterize properties of the graphene films. The formation of multilayer of graphene on silicon substrate was confirmed by Raman spectroscopy and TEM. It is possible to grow graphene directly on silicon substrate (without using catalyst) due to high radical density of MW SWP CVD. In addition, we also observed that the hydrogen had significant role for quality of graphene.
KeywordsGraphene FilmsDirect SynthesisH<sub>2</sub>Flow RateSilicon SubstrateMicrowave Surface Wave Plasma CVD
- Novoselov, K.S., Geim, A.K., Morozov, S.V., Jiang, D., Zhang, Y., Dubonos, S.V., Grigorieva, I.V. and Firsov A.A. (2004) Electric Field Effect in Atomically thin Carbon Films. Science, 306, 666-669. http://dx.doi.org/10.1126/science.1102896
- Yan, J., Zhang, Y., Goler, S., Kim, P. and Pinczuk, A. (2007) Raman Scattering and Tunable Electron-Phonon Coupling in Single Layer Graphene. Solid State Communications, 143, 39-43. http://dx.doi.org/10.1016/j.ssc.2007.04.022
- Mkhoyan, K.A., Contryman, A.W., Silcox, J., Stewart, D.A., Eda, G., Mattevi, C., Miller, S. and Chhowalla, M. (2009) Atomic and Electronic Structure of Graphene-Oxide. Nano Letters, 9, 1058-1063. http://dx.doi.org/10.1021/nl8034256
- Lee, C., Wei, X., Kysar, J.W. and Hone, J. (2008) Measurement of the Elastic Properties and Intrinsic Strength of Monolayer Graphene, Science, 321, 385-388. http://dx.doi.org/10.1126/science.1157996
- Orlita, M., Faugeras, C., Plochocka, P., Neugebauer, P., Martinez, G., Maude, D.K., Barra, A.-L., Sprinkle, M., Berger, C. and de Heer, W.A. (2008) Approaching the Dirac Point in High-Mobility Multilayer Epitaxial Graphene. Physical Review Letters, 101, 267601. http://dx.doi.org/10.1103/physrevlett.101.267601
- Ishigami, M., Chen, J.H., Cullen, W.G., Fuhrer, M.S. and Williams, E.D. (2007) Atomic Structure of Graphene on SiO2. Nano Letters, 7, 1643-1648. http://dx.doi.org/10.1021/nl070613a
- Blake, P., Brimicombe, P.D., Nair, R.R., Booth, T.J., Jiang, D., Schedin, F., Ponomarenko, L.A., Morozov, S.V., Gleeson, H.F. and Hill, E.W. (2008) Graphene-Based Liquid Crystal Device. Nano Letters, 8, 1704-1708. http://dx.doi.org/10.1021/nl080649i
- Geim, A.K. and Novoselov, K.S. (2007) The Rise of Graphene. Nature Materials, 6, 183-191. http://dx.doi.org/10.1038/nmat1849
- Wang, X., Zhi, L. and Müllen, K. (2008) Transparent, Conductive Graphene Electrodes for Dye-Sensitized Solar Cells. Nano Letters, 8, 323-327. http://dx.doi.org/10.1021/nl072838r
- Meyer, J.C., Geim, A.K., Katsnelson, M.I., Novoselov, K.S., Booth, T.J. and Roth, S. (2007) The Structure of Suspended Graphene Sheets. Nature, 446, 60-63. http://dx.doi.org/10.1038/nature05545
- Lin, Y.-M., Jenkins, K.A., Valdes-Garcia, A., Small, J.P., Farmer, D.B. and Avouris, P. (2009) Operation of Graphene transistors at Gigahertz Frequencies. Nano Letters, 9, 422-426. http://dx.doi.org/10.1021/nl803316h
- Lee, H.-J., Kim, E., Yook, J.-G. and Jung, J. (2012) Intrinsic Characteristics of Transmission Line of Graphenes at Microwave Frequencies. Applied Physics Letters, 100, 223102-223103. http://dx.doi.org/10.1063/1.4722585