Polarization and Breakdown Analysis of AlGaN Channel HEMTs with AlN Buffer
- 1 Nano Device Simulation Laboratory, Electronics and Telecommunication Engineering Department, Jadavpur University, Kolkata, India
- 2 SKP Engineering College, Tiruvannamalai, India
- 3 Nano Device Simulation Laboratory, Electronics and Telecommunication Engineering Department, Jadavpur University, Kolkata, India
Abstract
We have demonstrated the first carrier density model for AlGaN channel with AlN buffer using spontaneous and piezoelectric polarization comparison with experimental and theoretical results. From the results we proved that the formation of 2DEG in undoped structure relied both on spontaneous and piezoelectric polarization. The electron distribution of Al concentration (0 < x < 0.5) was measured for both AlGaN channel and barrier. Barrier thickness assumed between 20 and 25 nm for validating the experimental results. The carrier concentration was observed at the specific interface of the N- and Ga-face by assuming x1, x2 = 0. The model results are verified with previously reported experimental data.
- Chung, J.W., Hoke, W.E., Chumbes, E.M. and Palacios, T. (2010) AlGaN/GaN HEMT With 300-GHz fmax. IEEE Electron Device Letters, 31, 195-197. http://dx.doi.org/10.1109/LED.2009.2038935
- Wu, Y.F., Saxler, A., Moore, M., Smith, R.P., Sheppard, S., Chavarkar, P.M., Wisleder, T., Mishra, U.K. and Parikh, P. (2004) 30-W/mm GaN HEMTs by Field Plate Optimization. IEEE Electron Device Letters, 25, 117-119. http://dx.doi.org/10.1109/LED.2003.822667
- Hashimoto, S., Akita, K., Tanabe, T., Nakahata, H., Takeda, K. and Amano, H. (2010) Epitaxial Layers of AlGaN Channel HEMTson AlN Substrates. SEI Technical Review, 71, 83.
- Raman, A., Dasgupta, S., Rajan, S., Speck, J.S. and Mishira, U.K. (2008) AlGaN Channel High Electron Mobility Transistors: Device Performance and Power-Switching Figure of Merit. Japanese Journal of Applied Physics, 47, 3359. http://dx.doi.org/10.1143/JJAP.47.3359
- Nanjo, T., Takeuchi, M., Suita, M., Abe, Y., Oishi, T., Tokuda, Y. and Aoyagi, Y. (2008) First Operation of A1GaN Channel High Electron Mobility Transistors. Applied Physics Express, 1, Article ID: 011101. http://dx.doi.org/10.1143/APEX.1.011101
- Nanjo, T., Takeuchi, M., Suita, M., Abe, Y., Oishi, T., Abe, Y., Tokuda, Y. and Aoyagi, Y. (2008) Remarkable Breakdown Voltage Enhancement in AlGaN Channel high Electron Mobility Transistors. Applied Physics Letters, 92, Article ID: 263502. http://dx.doi.org/10.1063/1.2949087
- Nanjo, T., Suita, M., Oishi, T., Abe, Y., Yagyu, E. and Tokuda, Y. (2009) Comparison of the Characteristics of the AlGaN Channel HEMTs Formed on SiC and Sapphire Substrates. Electronics Letters, 45, 424. http://dx.doi.org/10.1049/el.2009.0129
- Jeon, C.M. and (2004) The Improvement of DC Performance in AlGaNGaN HEFTs With Isoelectronic Al-Doped Channels. IEEE Electron Device Letters, 25, 120-122. http://dx.doi.org/10.1109/LED.2004.824246
- Liu, J., Zhou, Y., Chu, R., Cai, Y., Chen, K.J. and Lau, K.M. (2004) Al0.3Ga0.7N/Al0.05Ga0.95N/GaN Composite-Channel HEMTs with Enhanced Linearity. International Electron Devices Meeting (IEDM), 811.
- Liu, J., Zhou, Y., Chu, R., Cai, Y., Chen, K.J. and Lau, K.M. (2005) Highly Linear Al0.3Ga0.7N-Al0.05Ga0.95N-GaN Composite-Channel HEMTs. IEEE Electron Device Letters, 26, 145-147. http://dx.doi.org/10.1109/LED.2005.843218
- Bajaj, S., Hung, T.-H., Akyol, F., Nath, D. and Rajan, S. (2014) Modeling of High Composition AlGaN Channel High Electron Mobility Transistors with Large Threshold Voltage. Applied Physics Letters, 105, Article ID: 263503. http://dx.doi.org/10.1063/1.4905323